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TR Scan Premiuem Pack 3D
Non-contact surface measurement, nanométrique precision
TR Scan Premium allows the measuring of the most sensitive surfaces with astounding speed and precision. It has become unavoidable in many cases for hi-tech applications, when the traditional measuring by contact has reached its limits. Medical appliances, prosthesis, wafers, MEMS, semiconductors, metallic layers deposits, polymer films, optical components, research and development, quality control, are the areas of expertise of TR Scan Premium.
The exceptional high measuring speed coupled with an accuracy range of a nanometre form the main advantages of the TR Scan. Only some microseconds are needed for the acquisition of a three dimensional image.
- Non-contact
- Exceptional measurement speed
- Nanometric resolution
- State-of-the-art software
- Pre-programmed measurement templates
- Compatible with 2D and 3D standards
- Exchangeable optics, or mounted on a carousel
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Technical details
| Specifications | CCM-L1 0.2mm | CCM-L1 1mm | CCM-L1 4mm |
|---|---|---|---|
| Vertical measurement range | 200 µm | 0.95 mm | 3.9 mm |
| Line width | 0.96 mm ± 0.01 mm | 1.91 mm ± 0.01 mm | 4.78 mm ± 0.02 mm |
| Lateral spacing | 5 µm | 10 µm | 25 µm |
| Working distance | 5.3 mm ± 0.2 mm | 18.5 mm ± 0.2 mm | 41 mm ± 0.2 mm |
| Spot size | 2 µm | 4 µm | 10 µm |
| Lateral resolution | 1 µm | 2 µm | 5 µm |
| Accuracy | ± 80 nm | ± 300 nm | ± 1.2 µm |
| Digital opening | 0.7 | 0.55 | 0.33 |
| Maximum measurement angle | 90°+/-44° | 90°+/-33° | 90°+/-20° |
| Thickness measurement range | 20 μm – 280 μm | 75 μm – 1.35 mm | 300 μm – 5.5 mm |
| Minimum Ra measurement 1) | < 0.1 µm | < 0.8 µm | NA |