Swiss Measuring Instruments

TR Scan Premiuem Pack 3D

Non-contact surface measurement, nanométrique precision

TR Scan Premium allows the measuring of the most sensitive surfaces with astounding speed and precision. It has become unavoidable in many cases for hi-tech applications, when the traditional measuring by contact has reached its limits. Medical appliances, prosthesis, wafers, MEMS, semiconductors, metallic layers deposits, polymer films, optical components, research and development, quality control, are the areas of expertise of TR Scan Premium.

The exceptional high measuring speed coupled with an accuracy range of a nanometre form the main advantages of the TR Scan. Only some microseconds are needed for the acquisition of a three dimensional image.

  • Non-contact
  • Exceptional measurement speed
  • Nanometric resolution
  • State-of-the-art software
  • Pre-programmed measurement templates
  • Compatible with 2D and 3D standards
  • Exchangeable optics, or mounted on a carousel

Technical details

SpecificationsCCM-L1 0.2mmCCM-L1 1mmCCM-L1 4mm
Vertical measurement range200 µm0.95 mm3.9 mm
Line width0.96 mm ± 0.01 mm1.91 mm ± 0.01 mm4.78 mm ± 0.02 mm
Lateral spacing5 µm10 µm25 µm
Working distance5.3 mm ± 0.2 mm
18.5 mm ± 0.2 mm
41 mm ± 0.2 mm 
Spot size2 µm4 µm10 µm
Lateral resolution1 µm2 µm5 µm
Accuracy± 80 nm± 300 nm± 1.2 µm
Digital opening0.70.550.33
Maximum measurement angle90°+/-44°90°+/-33°90°+/-20°
Thickness measurement range20 μm – 280 μm75 μm – 1.35 mm300 μm – 5.5 mm
Minimum Ra measurement 1)< 0.1 µm< 0.8 µmNA