CCML

Chromatic Confocal Microscopy Line Technology

Fast 3D topography

The chromatic confocal line sensor offers an incredibly fast 3D measurement of 384.000 points per second for a very wide range of applications.

Technical specifications for CCML1 ( 3D line )

The chromatic confocal line sensor TRIMOS CCML1 offers an incredibly fast 3D measurement of 384.000 points per second with nanometric scale resolution.

A robust and compact design, as well as outstanding dynamic range and an excellent signal to noise ratio, make the TRIMOS CCML1 the best measuring tool for all materials – including polished and highly tilted surfaces. With its unrivaled performance/price ratio, TRIMOS CCML1 is the best choice for ultrafast 3D inspection

OPTICAL PROBE	CCM-L1 0.2 mm	CCM-L1 1 mm	CCM-L1 4 mm
Measuring range	200 µm	0.95 mm	3.9 mm
Line length	0.96 mm ± 0.01 mm	1.91 mm ± 0.01 mm	4.78 mm ± 0.02 mm
Lateral pitch (Y)	5 µm	10 µm	25 µm
Working distance¹⁾	5.3 mm ± 0.2 mm	18.5 mm ± 0.2 mm	41 mm ± 0.2 mm
Spot diameter	2 µm	4 µm	10 µm
Lateral resolution	1 µm	2 µm	5 µm
Axial resolution (Z)	20 nm	80 nm	320 nm
Accuracy ²⁾	± 80 nm	± 300 nm	± 1.2 µm
Numerical aperture	0.7	0.55	0.33
Measurement angle to surface³⁾	90°+/-44°	90°+/-33°	90°+/-20°
Thickness measuring range⁴⁾	20 μm - 280 μm	75 μm - 1.35 mm	300 μm - 5.5 mm
Dimension length diameter	70.4 mm / 37 mm	93.3 mm / 54 mm	120 mm / 58 mm

1) bottom of optical probe to middle of measuring range
2) measurement on perpendicular mirror at 20°C
3) decreasing accuracy on the limits
4) refractive index n = 1.5