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CCML

Chromatic Confocal  Microscopy Line Technology

Fast 3D topography

The chromatic confocal line sensor offers an incredibly fast 3D measurement of 384.000 points per second for a very wide range of applications.

Technical specifications for CCML1 ( 3D line )

 

CCML1

The chromatic confocal line sensor TRIMOS CCML1 offers an incredibly fast 3D measurement of 384.000 points per second with nanometric scale resolution.

A robust and compact design, as well as outstanding dynamic range and an excellent signal to noise ratio, make the TRIMOS CCML1 the best measuring tool for all materials – including polished and highly tilted surfaces. With its unrivaled performance/price ratio, TRIMOS CCML1 is the best choice for ultrafast 3D inspection

                         
CCM-L1 0.2mm CCM-L1 1mm CCM-L1 4mm

OPTICAL PROBE

CCM-L1 0.2 mm

CCM-L1 1 mm

CCM-L1 4 mm

Measuring range

200 µm

0.95 mm

3.9 mm

Line length

0.96 mm ± 0.01 mm

1.91 mm ± 0.01 mm

4.78 mm ± 0.02 mm

Lateral pitch (Y)

5 µm

10 µm

25 µm

Working distance1)

5.3 mm ± 0.2 mm

18.5 mm ± 0.2 mm

41 mm ± 0.2 mm

Spot diameter

2 µm

4 µm

10 µm

Lateral resolution

1 µm

2 µm

5 µm

Axial resolution (Z)

20 nm

80 nm

320 nm

 Accuracy 2)
 ± 80 nm
± 300 nm
± 1.2 µm 
 Numerical aperture
 0.7
0.55
 0.33
 Measurement angle to surface3)  90°+/-44° 90°+/-33°   90°+/-20°
 Thickness measuring range4)  20 μm - 280 μm 75 μm - 1.35 mm   300 μm - 5.5 mm
 Dimension length diameter

70.4 mm / 37 mm

 93.3 mm / 54 mm
120 mm / 58 mm

1) bottom of optical probe to middle of measuring range
2) measurement on perpendicular mirror at 20°C
3) decreasing accuracy on the limits
4) refractive index n = 1.5