Exchangeable Interference Objectives
-Mirau objectives are used for higher magnification (10x; 20x; 50x; 100x)
-Michelson objectives are used for lower magnification (2.5x; 5x)
-The objectives are exchangeable and this can be used to adapt the system to the necessary field of view and resolution
-Interference pattern will pictured if object and reference beam have the same length
The interferometry provides the extreme height resolution of 0.1 nm for all objectives (in contrary to other principles as confocal microscopy and focus variation)