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TR Scan Compact WLI

High precision non-contact surface measurement


TR Scan WLI

The new TR Scan Compact WLI range allows measurements on any type of material with sub-nanometric resolution.

With its simplicity of use and small size it integrates easily in a lab environment and permit to realize quick and simple measurements.

  • Non-contact
  • Small footprint
  • Measuring range 400 µm
  • Resolution 0.1 nanometer
  • Extremely easy to use
  • 2.5x and 5x Michelson type optics for a wide field of view
  • Exchangeable optics, or mounted on a carousel
 

WLI (While Light Interferometry) technology combined with a piezo motor allows extremely fast measurements.
The table allows manual movement with workpieces weighing up to 5 kg.
Motorized tables are available as an option to extend the X&Y measuring range.

 TR Scan Z axis displacement
 

Z-axis displacement

The Z-axis travel wheel has two functions: quick movement and fine positioning to easily adjust the working distance.
 TR Scan Mounting Bases
 

Mounting Bases

The table's thumbwheel allows precise movement in X & Y.  
 
         
TR Scan  Tilt Adjustment
 

Tilt Adjustment

The tilt adjustment of the table is done using the two knobs on the front of the table.
WLI optics
 

Optics

A carousel of optics is available as an option.
 
         

Technical Specifications

Specifications
WLI 2.5x
WLI 5x
WLI 10x 
WLI 20x 
 WLI 50x  WLI 100x
Resolution
 0.1 nm 0.1 nm   0.1 nm  0.1 nm 0.1 nm
 0.1 nm
Lateral resolution (X/Y)
4.81 µm
4.81 µm
1.2 µm
0.9 µm
 0.66 µm  0.52 µm
Measuring range
400 µm
400 µm
400 µm
400 µm
 400 µm 400 µm 
Measuring range X/Y

~4536 µm x

~3447 µm

~2268 µm x

~1723 µm

~1134 µm  x

~861 µm

~567 µm   x

~430 µm

~226 µm x

 ~172 µm

~113 µm  x

 ~86 µm
Optical Zoom
2.5x
5x
10x
 20x  50x  50x
Working distance
~10.3 mm
~9.3 mm
~7.4 mm
~4.7 mm
 ~3.4 mm  ~3.4 mm

Models

Reference
Model
Optics
Manual table
Motorized table
TR Scan Compact WLI
700 403 10 31 TR Scan C. WLI MA 73x55 5x, 20x 75x33
700 403 10 34 TR Scan C. WLI MO 75x50 5x, 20x    75x50
700 403 10 35 TR Scan C. WLI MO 100x100 5x, 20x   100x100
TR Scan Extended WLI Multiple objectives (Carousel)
700 406 10 32
TR Scan E. WLI MA 73x55
5x, 10x, 50x
73x55  
700 406 10 36
TR Scan E. WLI MO 75x50
5x, 10x, 50x
  75x50
700 406 10 37
TR Scan E. WLI MO 100x100
5x, 10x, 50x
   100x100