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 3D CCMP2

3D CCMP2

TR Scan


Trimos N° 700 405 30 33

Pack including

3D CCMP2 pack-2

  • TRSCAN with 3 CNC Axes ( Z / X / Y )
  • Confocal spectrometer Box
  • CL300 or CL600 ( 1 optical pen )
  • 2 Screen TFT 19”
  • Workstation Dell with Windows Seven 64 bits Ultimate
  • Trimos Measurement and Trimos Analysis STT software

Application : Versatil instrument
                     Roughness in 3D and Microtopography for all parts



3D ccmp1 application

Technical specifications for CCMP2

 

principe-microscopie-confocal-en

 
A wide range of sensor are available with this version. It also offers significant numerical aperture.

An objective colour L projects the image of a point source W along a continuum of monochromatic images located on the optical axis ("colour coding").

A sample placed in the area of colour coding shows the surface diffuse the incident light brush.

Backscattered light through the lens colour L in the opposite direction and arrives at a hole P that filters all wavelengths except one, λM.

The collected light is analyzed by a spectrograph S. The position of the sample is directly related to the wavelength detected λM.

 ​

CCMP2      Chromatic confocal for distance & thickness
                             CL100 CL300 CL350 CL400 CL600 CL1000

OPTICAL PROBE

CL100 µm

CL300 µm

CL350 µm

CL400 µm

CL600 µm

CL1000 µm

Measuring Range

100 µm

300 µm

350 µm

400 µm

600 µm

1000 µm

Working distance1)

1.4 mm

4.5 mm

8.4 mm

15.3 mm

6.5 mm

19.1 mm

Resolution

3 nm

10 nm

12 nm

14 nm

20 nm

35 nm

Max slope 2)

+/-45°

+/-30°

+/-20°

+/-45°

+/-30°

+/- 45°

Lateral resolution

1.8 µm

2.5 µm

2.5 µm

2 µm

2 µm

1.8 µm

Numerial operture

0.7

0.7

0.7

0.7

0.7

0.26

Spot size

3.5 µm

5 µm

5 µm

4 µm

4 µm

3.5 µm


                             cl2 cl3 cl6 cl10 cl25

OPTICAL PROBE

CL2 mm

CL3 mm

CL6 mm

CL10 mm

CL25 mm

Measuring Range

2 mm

3 mm

6 mm

10 mm

25 mm

Working distance1)

61 mm

22.5 mm

35 mm

70 mm

76.5 mm

Resolution

70 nm

100 nm

200 nm

300 nm

800 nm

Max slope 2)

+/-15°

+/-30°

+/-25°

+/-20°

+/-15°

Lateral resolution

6 µm

6 µm

8 µm

12 µm

12 µm

Numerial operture

0.26

0.5

0.43

0.33

0.26

Spot size

12.5 µm

12 µm

16 µm

24 µm

25 µm


1) Bottom of probe to middle of measuring range
2) Decrasing accuracy on the limits
At Refractive index n = 1.5