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 3D WLI

3D WLI

 

(band)

TR Scan - 3 Optics


Trimos N° 700 405 40 40


Pack including

3D WLI-2

  • TRSCAN with 2 CNC Axes ( Z / X )
  • WLI with objective 10x and 20x and 50x
  • 2 Screen TFT 19”
  • Workstation Dell with Windows Seven 64 bits Ultimate
  • Trimos Measurement and Trimos Analysis STT software

Application : Fast measurement limited at the lateral size
                     For roughness in 3D and microtopography for all parts

                        
3D WLI application

Technical specifications for WLI

 

WLI

White-light interferometry is among the proven optical measurement techniques for recording 3-D topographies with depth resolution in the lower nanometre range. The measurement points are acquired and processed in parallel, the height information can be gathered over a large area in a very short time.

Typical applications in research and in quality management are the characterisation of surfaces with different roughness values (wafer structures, mirrors, glass, metals), the determination of step heights and the precise measurement of curved surfaces, such as microlenses.

The product family WLI offers innovative solutions utilising this measurement principle. The control and analysis of the entire measurement process is done using the proven Trimos Nanoware software.

The efficient, robust and highly accurate analysis algorithms are the result of extensive research and experience in this area

 ​

OPTICAL PROBE

WLI 2.5x

WLI 5x

WLI 10x

WLI 20x

WLI 50x

WLI 100x

Resolution in Z

 0.1 nm
 0.1 nm

0.1 nm

0.1 nm

0.1 nm

 0.1 nm

Resolution lateral (X/Y)

 4.81 µm  2.77 µm

1.2 µm

0.9 µm

0.66 µm

 0.52 µm

Vertical range

 400 µm  400 µm

400 µm

400 µm

400 µm

 400 µm

Measuring area range X/Y

~4536 µm x ~3447 µm ~2268 µm x ~1723 µm

~1134 µm x ~861 µm

~567 µm x ~430 µm

~226 µm x ~172 µm

~113 µm x ~86 µm

Optical zoom

 2.5x  5x

10x

20x

50x

 100x

Working distance

 ~10.3 mm  ~9.3 mm

~7.4 mm

~4.7 mm

~3.4 mm
~ 2 mm